The spatial density distribution of the ion flux in the laser-plasma source for deposition of nanocoating on substrates of increased size

The present work is devoted to the experimental determination of uniformity ion flux density on a substrate with an increased size (~200 cm2 ) in order form nanostructures by laser-plasma method. system for deposition consists erosion laser torch target material and located vacuum chamber. For smooth adjustment parameters deposited particles substrate, grid between which negative potential applied relative target. As result, particle stream formed after grid, consisting mainly ions, whose energy can be reliably smoothly controlled applying positive relation substrate. Experiments have shown that fluxes source nanocoating accelerating grid. minimum difference center at its edge reduced ~5 %. it technologically possible clean surface ions (secondary emission), create pseudodiffusion layer near-surface region apply At same time, all these operations performed sequentially without depressurising This allows obtaining coating good adhesion substrates size.